An Electromechanical Sigma-delta Modulator for Mems Gyroscope
نویسندگان
چکیده
This paper presents a design and analysis of electromechanical sigma-delta modulator for MEMS gyroscope, which enables us to control the proof mass and to obtain an exact digital output without additional A/D conversion. The system structure and the circuit realization of the sigma-delta modulation are simpler than those of the analog sensing and feedback circuit. Based on the electrical sigma-delta modulator theory, a compensator is designed to improve the closed loop performance of the sensor. With the designed compensator, a closed loop performance of the gyroscope is enhanced to have wider bandwidth, larger dynamic range and direct digital output compared with those of an analog open loop system. Copyright © 2005 IFAC
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